WitrynaCompany History Sumitomo Electric Industries, LTD. Listed in NIKKEI 225 FY2024 Sales (Consolidated): ¥2,918 billon Nissin Electric Co., LTD. Listed in Tokyo Stock Exchange Power distribution systems, Smart grid Nissin Ion Equipment Co, LTD. Products: Ion implantation tools Nissin Ion Equipment USA, Inc. Field Support, R&D Partner with … Witryna7 lis 2012 · We developed the high temperature ion implanter “IMPHEAT” for mass production of 6 inch SiC wafers. IHC (Indirectly Heated Cathode) ion source was …
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Witryna19 gru 2024 · IMPHEAT-II, a novel high temperature ion implanter for mass production of SiC power devices Authors (first, second and last of 23) Yusuke Kuwata Shiro Shiojiri Weijiang Zhao Content type: Original Paper Published: 16 December 2024 Pages: 1486 - 1489 Purion XEmax, Axcelis ultra-high energy implanter with Boost™ technology WitrynaA new higher temperature ion implanter, IMPHEAT®-II, having 3 times higher mechanical throughput and 2 times of higher effective throughput was developed. In this paper, the basic performance of IMPHEAT®-II will be presented. simplenexus knowledge base
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Witryna7 sty 2011 · High productivity medium current ion implanter ``IMPHEAT'' was developed for a commercial silicon carbide (SiC) device production. The beamline concept of … Witrynaimpheat-ii. 高温搬送の信頼性とスループットをimpheatからさらに進化させた高温イオン注入装置. 特長. 業界最高の生産性を持つ高温イオン注入装置で、sicパワーデバイス向けアルミニウム(ai)注入が可能. 室 … Witryna17 paź 2024 · ・IMPHEAT-II, A Novel High Temperature Ion Implanter for SiC Power Devices ・A Newly Developed ECR Ion Source with Wide Dynamic Range of Beam Current ・New Control System of the Multiple Filaments in the Large Ion Source for Ion Doping System iG6 Ver.2 which drew considerable attention. ray and buck show